MEMS is used to fabricate physical sensors such as pressure sensor, accelerometer, gyroscope. Recently, the application area is expanded to the RF communication, bio technology, microlithography. Most MEMS technology is based on the semiconductor fabrication processes except that it can realize 3-dimensional devices. Many of these fabrication processes include physical vapor deposition techniques. For example, RF MEMS switch fabricated by MEMS technology use multiple sputtered metal layers.
The Axcela™ System provides MEMS applications by providing:
- High deposition rates (>1um/min on the MEMS metals)
- Versatility : various metal targets or alloy targets
- High target utilization (>50%)
- RF biasing capabilities to minimize intrinsic stress issues
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